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Martin-Luther-University
Interdisziplinäres Zentrum für Materialwissenschaften
Nanotechnikum Weinberg
Heinrich-Damerow-Str. 4,
D-06120 Halle, Germany
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M. Z. Minhas, H. H. Blaschek, F. Heyroth, G. Schmidt
Sidewall depletion in nano-patterned LAO/STO heterostructures
AIP Advances 6 (2016), 035002

We have investigated the conductance of nanostructures fabricated from the quasitwo-dimensional electron gas (q2DEG) formed at the LaAlO3/SrTiO3 ( LAO/STO) interface. Measurements were done at room temperature and at T=4.2 K. Our findings show that the fully industry compatible nano- patterning process conserves the conductivity except for a small temperature dependent sidewall depletion which we attribute to etch damage induced by the dry etching process.

Keywords: OXIDE HETEROSTRUCTURES; ROOM-TEMPERATURE; INTERFACES; SrTiO3

DOI10.1063/1.4943401


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