Interdisziplinäres Zentrum für Materialwissenschaften
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Interdisziplinäres Zentrum für Materialwissenschaften
Nanotechnikum Weinberg
Heinrich-Damerow-Str. 4,
D-06120 Halle, Germany
Phone: +49 345 55 28471
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T. Höche, R. Böhme, J. W. Gerlach, B. Rauschenbach, F. Syrowatka
Nanoscale laser patterning of thin gold films
Phil. Mag. Lett. 86 (10) (2006), 661-667

Square grids of gold dots were prepared from several nanometer gold films by locally confined excimer laser ablation. Diffraction-mask projection laser ablation at a wavelength of 248 nm was used to convert Au films of 3, 6 and 9 nm thickness on sapphire substrates into well-ordered arrangements of substrate-adhered gold nanodots. Employing a checkerboard phase mask, gold-cap diameters between 75 and 115 nm can be obtained. The methodology allows simultaneous ablation of areas of ~50×50 µm in about 1 s and, hence, represents a valuable supplement to the more laborious methods currently in use for the preparation of nanodot template patterns for, say, nanowire growth.

Keywords: nano, gold, preparation, lithography, nanowire
© Taylor & Francis 2006

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