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Martin-Luther-University
Interdisziplinäres Zentrum für Materialwissenschaften
Nanotechnikum Weinberg
Heinrich-Damerow-Str. 4,
D-06120 Halle, Germany
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M.Schmidbauer, D.Grigoriev, M.Hanke, P.Sch?fer, T.Wiebach, R.K?hler Effects of Grazing Incidence on the X-Ray Diffuse Scattering from Self-Assembled Nanoscale Islands Phys. Rev. B 71 (2005), 115324
Grazing incidence small angle x-ray scattering and grazing incidence x-ray diffraction from SiGe
nanoscale islands grown on Si(001) substrate were investigated. Experiments and corresponding
theoretical simulations based on the distorted-wave Born approximation were carried out. The strain
field inside and in the vicinity of the SiGe islands was calculated in the framework of linear elasticity
theory using the numerical finite element method. The diffuse intensity pattern in reciprocal space
reveals a well resolved fine structure with prominent maxima and a complicated fringe pattern. The
distribution of diffuse intensity in reciprocal space strongly depends on the angle of incidence with
respect to the sample surface. The results obtained substantiate the important role of basically
four (GISAXS) and nine (GID) scattering channels that have to be considered for a complete
understanding of the scattering scenario. A refined island model concerning shape, size and Ge
composition was elaborated. Keywords: Diffuse X-ray Scattering; SiGe islands
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