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Martin-Luther-University
Interdisziplinäres Zentrum für Materialwissenschaften
Nanotechnikum Weinberg
Heinrich-Damerow-Str. 4,
D-06120 Halle, Germany
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M.Hanke, H.Raidt, R.K?hler, H.Wawra Island chain formation during liquid phase epitaxy of SiGe on silicon Appl. Phys.Lett. 83, 24 (2003), 4927-4929
We report on the evolution of lateral ordering of SiGe nanoscale islands on Si(001), which have
been grown by means of liquid phase epitaxy in the Stranski-Krastanow mode. Applying
post-growth atomic force microscopy on different sample areas covered by different island densities,
we could trace ex-situ the development of extended island chains along the <100>-directions. The
linear alignment happens by further nucleation of islands at the end of an already existing formation.
Those direct observations will be discussed in terms of finite element strain energy calculations
around various island configurations. Keywords: SiGe, liquid phase epitaxy, self-organization, finite element method
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