Theoretical fundamentals and experimental material of defect studies in compound semiconductors using quantitative SEM-CL/EBIC S. Hildebrandt, J. Schreiber, W. Hergert, H. Uniewski and H. S. Leipner Martin-Luther-Universität Halle-Wittenberg, Fachbereich Physik, 06099 Halle, Germany   Abstract | Introduction | Theoretical Fundamentals | Simulation Results | Experimental Details | Experimental Results | Conclusions | Acknowledgements | Discussion with Reviewers