Interdisziplinäres Zentrum für Materialwissenschaften
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M. Hanke, T. Boeck, A.-K. Gerlitzke
Template-based assembling of SiGe/Si(001) islands by local anodic oxidation
Appl. Phys. Lett. 88 (2006), 173106

Template-based SiGe/ Si(001) island formation has been performed by a combination of local anodic oxidation and liquid phase epitaxy. In case of unidirectional stripes the island pattern directly follows along the trenches, whereas a squarelike stripe pattern enforces island nucleation within the oxide-free cavities. The final island size significantly probes an effectively lowered lattice mismatch, thus a locally expanded crystal lattice in noncovered areas of the silicon substrate.

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