A considerable number of vacancies is formed during the glide motion of dislocations in indium phosphide. The main reason of the formation of vacancies is the dragging of jogs along screw dislocations. The generated vacancies are utilized to form secondary defects, such as stable vacancy clusters, divacancies and antisites. In InP deformed at different temperatures, the generation of these defects is studied by means of photoluminescence and positron lifetime spectroscopy.