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Bereiche im Nanotechnikum |
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Martin-Luther-Universität
Interdisziplinäres Zentrum für Materialwissenschaften
Nanotechnikum Weinberg
Heinrich-Damerow-Str. 4, D-06120 Halle, Germany
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M. Hanke, D. Grigoriev, M. Schmidbauer, P. Sch?fer, R. K?hler, R. L. Sellin, U. W. Pohl, D. Bimberg Vertical composition gradient in InGaAs/GaAs alloy quantum dots as revealed by high resolution x-ray diffraction Appl. Phys. Lett. 85 (2004), 3062-3064
Shape and composition profiles of self-organized InGaAs/GaAs quantum dots (QDs) were
investigated using diffuse x-ray scattering of a fivefold QD stack. To reveal the QD morphology,
numerical scattering simulations of QDs with different morphologies were performed based on
three-dimensional strain fields calculated by the finite element methods. Comparing our simulations
to the data, we proved that the In concentration increases from the wetting layer to the top of the
quantum dots. Moreover, we conclude that the In concentration of the wetting layers is significantly
lower than the average value in the QDs. Keywords: InGaAs/GaAs, quantum dots, composition profile
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